JPH0220128U - - Google Patents

Info

Publication number
JPH0220128U
JPH0220128U JP9893388U JP9893388U JPH0220128U JP H0220128 U JPH0220128 U JP H0220128U JP 9893388 U JP9893388 U JP 9893388U JP 9893388 U JP9893388 U JP 9893388U JP H0220128 U JPH0220128 U JP H0220128U
Authority
JP
Japan
Prior art keywords
force
conversion element
pressure sensor
adjustment screw
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9893388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526515Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9893388U priority Critical patent/JPH0526515Y2/ja
Priority to US07/384,817 priority patent/US4993266A/en
Priority to EP89113807A priority patent/EP0352773B1/en
Priority to DE89113807T priority patent/DE68905967T2/de
Publication of JPH0220128U publication Critical patent/JPH0220128U/ja
Application granted granted Critical
Publication of JPH0526515Y2 publication Critical patent/JPH0526515Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP9893388U 1988-07-26 1988-07-26 Expired - Lifetime JPH0526515Y2 (en])

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP9893388U JPH0526515Y2 (en]) 1988-07-26 1988-07-26
US07/384,817 US4993266A (en) 1988-07-26 1989-07-25 Semiconductor pressure transducer
EP89113807A EP0352773B1 (en) 1988-07-26 1989-07-26 Piezoresistive si single crystal pressure transducer
DE89113807T DE68905967T2 (de) 1988-07-26 1989-07-26 Piezoresistiver Si Einkristall Druckwandler.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9893388U JPH0526515Y2 (en]) 1988-07-26 1988-07-26

Publications (2)

Publication Number Publication Date
JPH0220128U true JPH0220128U (en]) 1990-02-09
JPH0526515Y2 JPH0526515Y2 (en]) 1993-07-05

Family

ID=31325632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9893388U Expired - Lifetime JPH0526515Y2 (en]) 1988-07-26 1988-07-26

Country Status (1)

Country Link
JP (1) JPH0526515Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7232969B1 (ja) * 2023-01-30 2023-03-03 シチズンファインデバイス株式会社 圧力検出装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7232969B1 (ja) * 2023-01-30 2023-03-03 シチズンファインデバイス株式会社 圧力検出装置
US12130201B2 (en) 2023-01-30 2024-10-29 Citizen Finedevice Co., Ltd. Pressure detection device with detachable temperature reducing buffer member

Also Published As

Publication number Publication date
JPH0526515Y2 (en]) 1993-07-05

Similar Documents

Publication Publication Date Title
JPH0220128U (en])
JPS6179016U (en])
JPS6286409U (en])
JPS6358731U (en])
JPS6228153U (en])
JPS647766U (en])
JPH0320398U (en])
JPS60135639U (ja) 圧電センサ−
JPH01113606U (en])
JPS60191950U (ja) 半導体圧力センサ
JPS6347275U (en])
JPS6327846U (en])
JPS62141915U (en])
JPS6193617U (en])
JPH0353613U (en])
JPS59179352U (ja) 半導体圧力センサ
JPS61110851U (en])
JPS61119391U (en])
JPH0295831U (en])
JPS62162408U (en])
JPH03101438U (en])
JPS62115137U (en])
JPH0228771U (en])
JPH0234076U (en])
JPH0485245U (en])